Microassembly
CataloguedThe assembly of nano, micro or mesoscale systems and components with dimensions between 1 µm to 1 mm. Because of the need for precision on a microscale, micro assemblies require reliable visual alignment equipment, such as ion beam imaging systems and stereo electronic microscopes, as well as precision tools and machines, such as microgrippers. The microsystems are assembled according to techniques of doping, thin films, etching, bonding, microlithography, and polishing.
Microassembly sits under Biology and Life Sciences in the Science and Research domain of the Luminid skills catalogue.
Also known as
- assembly of mesoscale systems
- assembly of microscale systems
- assembly of nanoscale systems
- MEMS assembly
- mesoscale assembly
- micro assembly
- micro fabrication assembly
- micro-assembly
- micro-fabrication
- micro-fabrication methods
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